Free Fast Quote: Link
The AW-2001R single-wafer Etcher is an automated tool designed as a flexible
downstream Microwave system for high-volume wafer fabrication. AW-2001R is in
direct response to manufacturer’s concerns for wafer damage, uniformity,
uptime, reliability and production-proven technology
- Contact Slope Etch
- Via Etch
- BPSG Etch
- LTO Etch
- TEOS Etch
- Thermal Oxide Etch
- LPCVD Nitride Etch
- PECVD Nitride Etch
- Trench Rounding
- Descum
- RIE Damage Removal
- Sodium Removal
- Planarization
- Backside Etch (Poly, Nitride, or Oxide)
- Nitride Pattern Removal (PBL, LOCOS w/ Pad Ox = >400Å)
- Low Temp Photoresist Ashing over Oxides, Poly, Al, W, Ti, or Moly
- Production-proven plasma etching system.
- No damage downstream plasma etcher(≤0.1 Volt CV-shift )
- “Extended” Alumina Plasma Tube for better uniformity.
- Frontside isotropic etch and backside etch if pins-up
- 75mm-150mm wafer capability.
- Varied wafer sizes capability without hardware change if necessary.
- Integrated 3-axis robotic wafer handling for increased throughput and less wafer breakage.
- Optional alignment/cooling station to prevent wafer breakage
- Water-Cooled 1000W Magnetron/Waveguide with an AGL 2.45GHz Microwave Power Generator for better process repeatability.
- Can handle 50um thickness wafer
- PC controller with Advanced Allwin21 Software Package with touch screen monitor GUI
- Can handle 50um thickness wafer
- 4 isolated gas lines with MFC’s
- Pressure control for process repeatability
- EMO, Interlocks and Watchdog function
- GEM/SECS II interface, Optional
- Light Tower, Optional
- Small Footprint
- Made in U.S.A.
- Real time graphics display (GUI), process data acquisition, display, and analysis.
- Closed-loop process parameters control.
- Precise parameters profiles tailored to suit specific process requirements.
- Programmable comprehensive calibration of all subsystems from within the software. This allows faster, easier calibration, leading to enhanced process results.
- Recipe creation. It features a recipe editor to create and edit recipes to fully automate the processing of wafers inside the process chamber.
- Validation of the recipe so improper control sequences will be revealed.
- Storage of multiple recipes, process data and calibration files so that process and calibration results can be maintained and compared over time.
- Passwords provide security for the system, recipe editing, diagnostics, calibration and setup functions
- Simple and easy to use menu screen which allow a process cycle to be easily defined and executed.
- Troubleshooting features which allows engineers and service personnel to activate individual subassemblies and functions. More I/O, AD/DA “exposure”.
- DB-25F parallel (printer) port. The computer interfaces to the Allwin21 system with only one cable: the control interface cable.
- The control board inside the machine that translates the computer commands to control the machine has a watchdog timer. If this board looses communication with the control software, it will shut down all processes and halt the system until communication is restored.
- GEM/SEC II function (Optional)
- Wafer Size: 2, 3, 4, 5, 6 inch Capability.
- Chuck Temperature: 60-110ºC (±2 ºC)
- Gases: NF3 CF4 HE O2
- Uniformity:
- 100mm : ± 3% (5% 3 sigma) *
- 150mm : ± 5% (8% 3 sigma) *
- *max.- min. /2 x average
- Reproducibility (w-t-w): 10% 3 sigma
- Particulate: 0.05p/cm2 > 0.3µm
- NO DAMAGE: ≤0.1 Volt CV-shift
- * Contact Allwin21 sales for other applications and specifications
- Main Frame with Breakers, Relays and Wires
- Pentium Class PC with AW Software
- Keyboard, Mouse, USS with SW backup and Cables
- Fixed Cassette Stations:1 Two Cassette Stations, or One Cassette Station / One Centering/Alignment Station
- Door Assembly
- Metal Shower head
- "Extended' Alumina Plasma Tube for better Uniformity.
- Orifice, Gas Cap
- Chamber Body and Top Plate
- Main Control , Distributor PCB and DC
- H1 -7X10.5 Integrated 3-Axls Solid Robot
- Water-Cooled Magnetron and Waveguide
- Water-Cooled 1000W Magnetron/Waveguide with an AGL 2.45GHz Microwave Power Generator
- 4 Isolated Gas Lines with Pneumatic Valves and MFC
- AC Box
- Main & Slow Vacuum Valves
- MKS Baratron
- Throttle Valve
- Front EMO, Interlocks
- 15-rnch Touch Screen GUI
- GEM/SECS II function (Software)
- Light Tower
- Vacuum Pump
